書誌事項

Processing of semiconductors

volume editor, Kenneth A. Jackson

(Materials science and technology : a comprehensive treatment / edited by R.W. Cahn, P. Haasen, E.J. Kramer, vol. 16)

VCH, c1996

  • : gw

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注記

Includes bibliographical references and index

内容説明・目次

内容説明

This volume is part of a series devoted to the growing interdisciplinary field of materials science and technology. A compendium of current state-of-the-art information, the series covers the most important classes of materials: metals; ceramics; glasses; polymers; semiconductors; and composites. Each volume deals with properties, processing, applications or general phenomena associated with these materials. This volume deals with the processing of semiconductors.

目次

  • Silicon Processing (J. Wilkes)
  • Compound Semiconductor Processing (J. Mullin)
  • Epitaxial Growth (T. Kuech & M. Tischler)
  • Photolithography (R. Leuschner & G. Pawlowski)
  • Selective Doping (S. Mahajan)
  • Etching Processes in Semiconductor Manufacturing (K. Donohoe, et al.)
  • Silicon Device Structures (C.-Y. Chang & S. Sze)
  • Compound Semiconductor Device Structures (W. Stanchina & J. Lam)
  • Silicon Device Processing (D.-L. Kwong)
  • Compound Semiconductor Device Processing (J. Parsey)
  • Integrated Circuit Packaging (D. Amey)
  • Interconnection Systems (W. Knausenberger)
  • Index.

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詳細情報

  • NII書誌ID(NCID)
    BA29133735
  • ISBN
    • 3527268294
  • 出版国コード
    gw
  • タイトル言語コード
    eng
  • 本文言語コード
    eng
  • 出版地
    Weinheim, FDR ; New York
  • ページ数/冊数
    689 p.
  • 大きさ
    25 cm
  • 件名
  • 親書誌ID
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