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Processing of semiconductors / volume editor, Kenneth A. Jackson. -- : gw. -- Weinheim, FDR ; New York : VCH , c1996. -- 689 p. : ill. ; 25 cm. -- (Materials science and technology : a comprehensive treatment / edited by R.W. Cahn, P. Haasen, E.J. Kramer ; vol. 16). -- Includes bibliographical references and index. -- ISBN 3527268294 ; (BA29133735) ; https://ci.nii.ac.jp/ncid/BA29133735
Author Heading(s): Cahn, R. W. (Robert W.) ; Haasen, P. (Peter) ; Kramer, E. J. (Edward J.) ; Jackson, Kenneth A.. -- Subject Heading(s): LCSH : Materials
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