@book{ BA29133735,
 author = "Cahn, R. W. (Robert W.) and Haasen, P. (Peter) and Kramer, E. J. (Edward J.) and Jackson, Kenneth A.",
 title = "Processing of semiconductors",
 publisher = "VCH",
 year = "1996",
 series = "Materials science and technology : a comprehensive treatment / edited by R.W. Cahn, P. Haasen, E.J. Kramer",
 number = "vol. 16",
 URL = "https://ci.nii.ac.jp/ncid/BA29133735"
}
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