Yttrium oxyfluoride
From Wikipedia, the free encyclopedia
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3D model (JSmol)
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PubChem CID
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| Properties | |
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| Molar mass | 123.903 g·mol−1 |
| Appearance | white powder |
| Density | 5.18 g/cm3 |
| Structure | |
| tetragonal | |
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
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Chemical compound
Yttrium oxyfluoride is an inorganic chemical compound with the formula YOF.[1] Under normal conditions, the compound is a colorless solid.[2]
Synthesis
[edit ]Yttrium oxyfluoride may be formed in the decomposition of crystalline hydrate of yttrium fluoride upon heating to 900 °C in a vacuum:
- {\displaystyle {\mathsf {2YF_{3}\cdot 1/2H_{2}O\ {\xrightarrow {\tau ,900^{o}C}}\ YOF+YF_{3}+2HF}}}
Yttrium oxyfluoride can also be made by hydrolysis of yttrium fluoride with superheated steam at 800 °C:
- {\displaystyle {\mathsf {2YF_{3}+H_{2}O\ {\xrightarrow {800^{o}C}}\ YOF+2HF}}}
Physical properties
[edit ]Yttrium oxyfluoride forms colorless crystals of tetragonal crystal system; its cell parameters are: a = 0.3910 nm, c = 0.5431 nm. According to hexagonal crystal family, the cell parameters are: a = 0.38727 nm, c = 1.897 nm, Z = 6.
Applications
[edit ]Stable yttrium oxyfluoride material is used for inner walls of plasma process equipment.[3] [4]
References
[edit ]- ^ Mann, A. W.; Bevan, D. J. M. (1970). "The crystal structure of stoichiometric yttrium oxyfluoride, YOF". Acta Crystallographica . B26 (12): 2129–2131. Bibcode:1970AcCrB..26.2129M. doi:10.1107/S0567740870005496 . Retrieved 16 June 2017.
- ^ Рипан, Р.; Четяну, И. (1992). Неорганическая химия (in Russian).
- ^ Shiba, Yoshinobu (January 2017). "Stable yttrium oxyfluoride used in plasma process chamber". Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films . 35 (2): 021405. Bibcode:2017JVSTA..35b1405S. doi:10.1116/1.4975143.
- ^ Tsunoura, Toru; Yoshida, Katsumi; Yano, Toyohiko; Kishi, Yukio (2 May 2017). "Fabrication, characterization, and fluorine-plasma exposure behavior of dense yttrium oxyfluoride ceramics". Japanese Journal of Applied Physics . 56 (6S2): 06HC02. Bibcode:2017JaJAP..56fHC02T. doi:10.7567/JJAP.56.06HC02. S2CID 126342556.