Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas
Damon DeBusk, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 2877)
SPIE, c1996
Optical characterization techniques for high-performance microelectronic device manufacturing 3
Includes bibliographical references and index
SPIE -- the International Society for Optical Engineering
SPIE -- the International Society for Optical Engineering