著者名	書名	版表示	出版者名	出版年	シリーズ名	番号	ISBN	ISSN	URL
Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing (Symposium) and DeBusk, Damon and Chen, Ray T. and Society of Photo-optical Instrumentation Engineers and Semiconductor Equipment and Materials International	Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas		SPIE	1996	Proceedings / SPIE -- the International Society for Optical Engineering	v. 2877	0819422754		https://ci.nii.ac.jp/ncid/BC06860076
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