MicroProcess 91 : proceedings of the 1991 International MicroProcess Conference, July 15-18, 1991, Kanazawa, Japan
edited by S. Namba, T. Tsurushima
(JJAP series, 5)
Publication Office, Japanese Journal of Applied Physics, 1991
"Sponspred by The Japan Society of Applied Physics (JSAP), In cooperation with American Vacuum Society (AVS), IEEE Electron Devices Society (IEEE EDS)"--T.p.
Publication Office, Japanese Journal of Applied Physics