@book{ BA19225892,
 author = "難波, 進 and Tsurushima, T. and 応用物理学会 and American Vacuum Society and IEEE Electron Devices Society",
 title = "MicroProcess 91 : proceedings of the 1991 International MicroProcess Conference, July 15-18, 1991, Kanazawa, Japan",
 publisher = "Publication Office, Japanese Journal of Applied Physics",
 year = "1992",
 series = "JJAP series",
 number = "5",
 URL = "https://ci.nii.ac.jp/ncid/BA19225892"
}
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