Optical characterization techniques for high-performance microelectronic device manufacturing II : 25-26 October 1995, Austin, Texas
John K. Lowell, Ray T. Chen, Jagdish P. Mathur, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 2638)
SPIE, c1995
Optical characterization techniques for high-performance microelectronic device manufacturing 2
Includes bibliographical references and index
SPIE -- the International Society for Optical Engineering
SPIE -- the International Society for Optical Engineering