TY - BOOK
AU - SPIE Advanced Lithography : Microelectronic Manufacturing : Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing
AU - Lowell, John
AU - Chen, Ray T.
AU - Mathur, Jagdish P.
AU - Society of Photo-optical Instrumentation Engineers
TI - Optical characterization techniques for high-performance microelectronic device manufacturing II : 25-26 October 1995, Austin, Texas
PB - SPIE
PY - 1995
T2 - Proceedings / SPIE -- the International Society for Optical Engineering
VL - v. 2638
EP - ix, 302 p.
UR - https://ci.nii.ac.jp/ncid/BC06604688
SN - 0819420042
ER -
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