著者名	書名	版表示	出版者名	出版年	シリーズ名	番号	ISBN	ISSN	URL
SPIE Advanced Lithography : Microelectronic Manufacturing : Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing and Lowell, John and Chen, Ray T. and Mathur, Jagdish P. and Society of Photo-optical Instrumentation Engineers	Optical characterization techniques for high-performance microelectronic device manufacturing II : 25-26 October 1995, Austin, Texas		SPIE	1995	Proceedings / SPIE -- the International Society for Optical Engineering	v. 2638	0819420042		https://ci.nii.ac.jp/ncid/BC06604688
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