Integrated circuit metrology, inspection, and process control III : 27-28 February 1989, Los Angeles, California

• • Monahan, Kevin M.
• • Society of Photo-optical Instrumentation Engineers

• 関連文献: 1件

• • Monahan, Kevin M.
• • Society of Photo-optical Instrumentation Engineers

Integrated circuit metrology, inspection, and process control III : 27-28 February 1989, Los Angeles, California

Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

(Proceedings / SPIE -- the International Society for Optical Engineering, v. 1087)

UMI, c1989

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• Integrated circuit metrology, inspection, and process control III, 27-28 February 1989, Los Angeles, California / Kevin M. Monahan, chair/editor ; sponsored by SPIE-the International Society for Optical Engineering

  BA12682987

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• 神戸大学 附属図書館 自然科学系図書館

  425-9-2//1087s031009410412*

  OPAC

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Facsimile reprint. originally published: Bellingham, Wash. : SPIE

Includes bibliographical references and index

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  Proceedings

  SPIE -- the International Society for Optical Engineering

  SPIE -- the International Society for Optical Engineering