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Integrated circuit metrology, inspection, and process control III : 27-28 February 1989, Los Angeles, California / Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering. -- Ann Arbor, MI : UMI , c1989. -- x, 535 p. : ill. ; 28 cm. -- (Proceedings / SPIE -- the International Society for Optical Engineering ; v. 1087). -- Facsimile reprint. originally published: Bellingham, Wash. : SPIE ; Includes bibliographical references and index. -- ISBN 0819401226 ; (BA2506993X) ; https://ci.nii.ac.jp/ncid/BA2506993X
Author Heading(s): Monahan, Kevin M. ; Society of Photo-optical Instrumentation Engineers. -- Classification(s): LCC : TK7874 ; DC20 : 621.381/5. -- Subject Heading(s): LCSH : Integrated circuits -- Inspection -- Congresses ; LCSH : Integrated circuits -- Measurement -- Congresses
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