@book{ BA2506993X,
 author = "Monahan, Kevin M. and Society of Photo-optical Instrumentation Engineers",
 title = "Integrated circuit metrology, inspection, and process control III : 27-28 February 1989, Los Angeles, California",
 publisher = "UMI",
 year = "1989",
 series = "Proceedings / SPIE -- the International Society for Optical Engineering",
 number = "v. 1087",
 URL = "https://ci.nii.ac.jp/ncid/BA2506993X"
}
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