Integrated circuit metrology, inspection, and process control III, 27-28 February 1989, Los Angeles, California

• • Monahan, Kevin M.
• • Society of Photo-optical Instrumentation Engineers

• 関連文献: 1件

• • Monahan, Kevin M.
• • Society of Photo-optical Instrumentation Engineers

Integrated circuit metrology, inspection, and process control III, 27-28 February 1989, Los Angeles, California

Kevin M. Monahan, chair/editor ; sponsored by SPIE-the International Society for Optical Engineering

(Proceedings / SPIE -- the International Society for Optical Engineering, v. 1087)

SPIE, 1989

並立書誌 全1件

• Integrated circuit metrology, inspection, and process control III : 27-28 February 1989, Los Angeles, California / Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

  BA2506993X

大学図書館所蔵 件 / 全2件

• 愛知工業大学 附属図書館 図

  425||S001971340

  東京科学大学 大岡山図書館

  P63600/108710910888X

  OPAC

• 該当する所蔵館はありません
• すべての絞り込み条件を解除する

• カーリル
• WorldCat

Includes bibliographical references and index

関連文献: 1件中  1-1を表示

• 1

  Proceedings

  SPIE -- the International Society for Optical Engineering

  SPIE -- the International Society for Optical Engineering