TY - BOOK
AU - Monahan, Kevin M.
AU - Society of Photo-optical Instrumentation Engineers
TI - Integrated circuit metrology, inspection, and process control III, 27-28 February 1989, Los Angeles, California
PB - SPIE
PY - 1989
T2 - Proceedings / SPIE -- the International Society for Optical Engineering
VL - v. 1087
EP - x, 535 p.
UR - https://ci.nii.ac.jp/ncid/BA12682987
SN - 0819401226
ER -
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