%A Monahan, Kevin M.
%A Society of Photo-optical Instrumentation Engineers
%T Integrated circuit metrology, inspection, and process control III, 27-28 February 1989, Los Angeles, California
%I SPIE
%D 1989
%S Proceedings / SPIE -- the International Society for Optical Engineering
%V v. 1087
%U https://ci.nii.ac.jp/ncid/BA12682987
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