A device using polarized light to measure the thickness of very thin films. Linearly polarized light is made to reflect or transmit off a surface, and the polarization of the resulting elliptically polarized light is then examined.
References
Azam, R. M. A. and Bashara, N. M. Ellipsometry and Polarized Light. Amsterdam, Netherlands: North-Holland, 1977.
Hilfiker, J.l Woollam, J.; Mowry, G.; Chow, P.; and Elman, J. "Automated Spectroscopic Ellipsometry." Industrial Physicist 2, 30-34, 1996.
Tompkins, H. G. User's Guide to Ellipsometry. Boston, MA: Academic Press, 1993.
