Oxalyl fluoride
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Oxalyl fluoride
Structural formula of oxalyl fluoride Structural formula of oxalyl fluoride
Ball-and-stick model of oxalyl fluoride Ball-and-stick model of oxalyl fluoride
Names
Identifiers
Properties
Preferred IUPAC name
Oxalyl difluoride
Other names
TL-108
- 359-40-0 checkY
3D model (JSmol)
ChemSpider
- 9287 ☒N
EC Number
- 206-630-4
UNII
- 2L7RR7QFL9 checkY
- InChI=1/C2F2O2/c3-1(5)2(4)6
- C(=O)(C(=O)F)F
C2F2O2
Molar mass
94.017 g/mol
Melting point
−3 °C (27 °F; 270 K)
Boiling point
26.6 °C (79.9 °F; 299.8 K)
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
Chemical compound
Oxalyl fluoride is the organofluorine compound with the formula (COF)2. It is a fluorinated derivative of oxalic acid. This colorless liquid is prepared by reaction of sodium fluoride with oxalyl chloride.[1]
Oxalyl fluoride is being investigated for use in etching as a replacement for compounds which have the liability of high global warming potential.[2] [3]
See also
[edit ]References
[edit ]- ^ C. W. Tullock, D. D. Coffman (1960). "Synthesis of Fluorides by Metathesis with Sodium Fluoride". J. Org. Chem. 25 (11): 2016–2019. doi:10.1021/jo01081a050.
- ^ Method of etching and cleaning using fluorinated carbonyl compounds, US Patent 6635185.
- ^ Simon Karecki; Ritwik Chatterjee; Laura Pruette; Rafael Reif; Terry Sparks; Laurie Beu; Victor Vartanian & Konstantin Novoselovc (2001). "Evaluation of Oxalyl Fluoride for a Dielectric Etch Application in an Inductively Coupled Plasma Etch Tool". J. Electrochem. Soc. 148 (3): G141 – G149. Bibcode:2001JElS..148G.141K. doi:10.1149/1.1348263.
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