MEMS, MOEMS, and micromachining III : 9-10 April 2008, Strasbourg, France
Hakan Urey, editor ; sponsored by SPIE Europe ; cosponsored by Alsace international (France) ... [et al.] ; cooperating organizations, AFOP--Association française des industries de l'optique et de la photonique (France) ... [et al.]
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 6993)
SPIE, c2008
MEMS, MOEMS, and micromachining 3
Includes bibliographical references and index
内容説明
「Nielsen BookData」 より
SPIE -- the International Society for Optical Engineering
SPIE -- the International Society for Optical Engineering