MEMS components and applications for industry, automobiles, aerospace, and communication II : 28-29 January 2003, San Jose, California, USA
Siegfried W. Janson, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 4981)
SPIE, c2003
MEMS components and applications for industry, automobiles, aerospace, and communication 2
Includes bibliographical references and index
SPIE -- the International Society for Optical Engineering
SPIE -- the International Society for Optical Engineering