TY - BOOK
AU - Janson, Siegfried W.
AU - Society of Photo-optical Instrumentation Engineers
AU - Semiconductor Equipment and Materials International
AU - Solid State Technology (Organization)
AU - Sandia National Laboratories
TI - MEMS components and applications for industry, automobiles, aerospace, and communication II : 28-29 January 2003, San Jose, California, USA
PB - SPIE
PY - 2003
T2 - Proceedings / SPIE -- the International Society for Optical Engineering
VL - v. 4981
EP - xliv, 248 p.
UR - https://ci.nii.ac.jp/ncid/BC16158975
SN - 0819447811
ER -
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