MOEMS and miniaturized systems V : 25-26 January 2005, San Jose, California, USA

書誌事項

MOEMS and miniaturized systems V : 25-26 January 2005, San Jose, California, USA

Ayman El-Fatatry, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology [and] Sandia National Laboratories (USA)

(Proceedings / SPIE -- the International Society for Optical Engineering, v. 5719)

SPIE, c2005

タイトル別名

MOEMS and miniaturized systems 5

MOEMS and miniaturized systems five

Microelectromechanical systems and miniaturized systems 5

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注記

Includes bibliographical references and author index

内容説明・目次

内容説明

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

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    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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