MOEMS and miniaturized systems V : 25-26 January 2005, San Jose, California, USA
Ayman El-Fatatry, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology [and] Sandia National Laboratories (USA)
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 5719)
SPIE, c2005
MOEMS and miniaturized systems 5
MOEMS and miniaturized systems five
Microelectromechanical systems and miniaturized systems 5
Includes bibliographical references and author index
SPIE -- the International Society for Optical Engineering
SPIE -- the International Society for Optical Engineering