Handbook of critical dimension metrology and process control : proceedings of a conference held 28-29 September 1993, Monterey, California

書誌事項

Handbook of critical dimension metrology and process control : proceedings of a conference held 28-29 September 1993, Monterey, California

Kevin M. Monahan, editor

(Critical reviews of optical science and technology, v. CR52)

SPIE Optical Engineering Press, c1994

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注記

Includes bibliographical references

内容説明・目次

内容説明

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

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