TY - BOOK
AU - Monahan, Kevin M.
AU - Society of Photo-optical Instrumentation Engineers
TI - Handbook of critical dimension metrology and process control : proceedings of a conference held 28-29 September 1993, Monterey, California
PB - SPIE Optical Engineering Press
PY - 1994
T2 - Critical reviews of optical science and technology
VL - v. CR52
EP - x, 358 p.
UR - https://ci.nii.ac.jp/ncid/BA26301618
SN - 0819413631
ER -
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