Index of various FPD manufacturing equipment
As of MAY 2, 2006
| Major Categories | Sub-Categories | Equipment Examples | ||
|---|---|---|---|---|
| A | LCD Design Equipment | 1 | CAD and CAM System | Pattern Generator, Plotter, Engineering Workstation |
| B | Mask / Reticle Manufacturing Equipment | 1 | Exposure / Writing Equipment | Exposure / Writing Equipment |
| 2 | Photoresist Processing Equipment | Coating Equipment, Developing Equipment,, Ashing Equipment,, Baking Equipment | ||
| 3 | Thin Film Deposition, Etching, Cleaner / Dryer | Vacuum Evaporation Equipment,, Etcher, Cleaner / Dryer, Scrubber | ||
| 4 | Inspection and Metrology Equipment & Others | Mask/Reticle Defect Inspector,, Defect Corrector, Mask Particle Inspector, , Others | ||
| C | Substrate Manufacturing Equipment | 1 | Glass Processing Equipment | Cutting/Polishing Equipment |
| 2 | Thin Film Deposition Equipment for Substrate | Coating Equipment, ITO Deposition Equipment | ||
| 3 | Cleaner / Dryer | Cleaner, Dryer, Scrubber | ||
| 4 | Baking Equipment | Baking Equipment | ||
| 5 | Inspection / Metrology Equipment & Others | Spectral Transmittance Meter, Chromaticity Inspection, Thickness Meter, Visual Inspector, Particle Inspector, Optical Checker, Waviness Tester, Others | ||
| D | Array Manufacturing Equipment | 1 | PVD Equipment | Spattering Equipment,, Vacuum Evaporation Equipment |
| 2 | CVD Equipment | Plasma Enhanced CVD, Low Pressure CVD, Atmospheric Pressure CVD | ||
| 3 | Anodic Oxidation Equipment | Anodic Oxidation Equipment | ||
| 4 | Exposure / Writing Equipment | Lens Projection Aligner, Mirror Projection Aligner, Contact/Proximity Aligner | ||
| 5 | Photoresist Processing Equipment | Coating Equipment, Developing Equipment, Ashing Equipment, Baking Equipment, Resist Stripping Equipment | ||
| 6 | Etching Equipment | Wet Etching Equipment, Dry Etching Equipment | ||
| 7 | Cleaner / Dryer | Cleaner, Dryer, Scrubber | ||
| 8 | Annealar Equipment | Oxidation Equipment, Annealing Equipment | ||
| 9 | Doping Equipment | Ion Implanter, Ion Shower, Ion Doping Equioment, Prasma Doping Equipment, Laser Doping Equipment | ||
| 10 | Inspection / Metrology Equipment & Others | Various Analyser, Thickness Measurement, Visual Inspecter, Particle Inspecter, Buss-line Inspecter, Others | ||
| E | Color Filter Manufacturing Equipment | 1 | Exposure & Writing Equipment | Lens Projection Aligner, Mirror Projection Aligner, Contact Proximity Aligner |
| 2 | Photoresist Processing Equipment | Coating Equipment, Developing Equipment, Resist Stripping Equipment Baking Equipment | ||
| 3 | Thin Film Deposition, Etching, Cleaner & Dryer | Spattering Equipment, Evaporation Equipment, Etching Equipment Cleaning/Drying Equipment | ||
| 4 | Color Pattern Processing Equipment | Printing Process Equipment, Electrodeposition Process Equipment Dyed Process Equipment, Pegment Process Equipment | ||
| 5 | Inspection and Metrology Equipment & Others | Various Analyser(Spectro,Resolution,Flatness etc.), Thickness Measurement, Particle Inspecter, Particle Inspecter, Others | ||
| F | Cell Manufacturing Equipment | 1 | Alignment Material Coating equipment | Dipping Coat Equipment,, Screen Printing Equipment,, Offset Printing Equipment |
| 2 | Baking / Drying Equipment | Clearn Oven, Conveyer Oven | ||
| 3 | Rabbing Equipment | Rabbing Equipment | ||
| 4 | Seal Patterning Equipment | Screen Printing Equipment | ||
| 5 | Spacer Sprayer | Spacer Sprayer | ||
| 6 | Panel Alignment Equipment | Panel Alignment Equipment | ||
| 7 | Filling Equipment | Vacuum Filling Equipmen | ||
| 8 | Cleaner / Dryer | Cleaner, Dryer | ||
| 9 | Scribe / Break Equipment | Scribe/Break Equipment | ||
| 10 | Polarizer Sticking Equipment | Polarizer Sticking Equipment | ||
| 11 | Inspection and Metrology Equipment & Others | Alignment Characteristic Inspection,, Transparency Test Inspection, Panel Defect Repair Teste, Burn-in Equipment, Others | ||
| J | Module Equipment | 1 | Module Equipment | ACF Sticking Machine,TAB Bonding(Mounting)Machine,COG Bonding(Mounting),COF Bonding(Mounting)Machine,PCB Bonding(Mounting)Machine |
| G | Test / Inspection Equipment | 1 | Defect Test Equipment | Defect Inspection Equipment |
| 2 | Function Inspection Equipment | Transparency Inspection, Optical Test Equipment, Dynamic Operating Inspection | ||
| 3 | Aging Equipment | Aging Equipment | ||
| 4 | Various Test / Inspection Equipment | Temperature Testing,, Humidity Testing,, Shock Testing, Life Time Testing, Vibration Testing | ||
| 5 | Prober Equipment | Prober Equipment | ||
| 6 | Repaire Equipment & Others | Laser Repair Equipment, Triming Equipment, Others | ||
| H | Related Equipment | 1 | Factory Automation Equipment | Substrate Transport Equipment, Transfer Equipment, Loader/Unloader, Transport Control System |
| 2 | DI Water / Chemical Control Equipment | DI Water Producing,, Ultrafiltering, ‡BReverse Osmosis,Sterilizing,, Chemicals Suppling, Chemical Purifing, Chemical Control System, Safety System | ||
| 3 | Various Gas Control Equipment | Gas Suppling, Gas Ultrafiltering/Mixing, Gas Detector, Gas Purifing, Gas Control System, Safety System | ||
| 4 | Clean Room Facility | Clean Bench, Clean Draft, Thermal Chamber, Enviromental Tester | ||
| 5 | Others Manufacturing Related Equipment | Controling, Central Monitoring,, Jig Cleaner/Dryer, Flow Controlling, Packaging, Gas Measuring/Analyzing, Others | ||
| I | FPD Manufacturing Equipment except LCD | 1 | OLED/PDP/FED/ Rear Projection Equipment | Evaporation Equipment,Ink Jet Equipment,Printing Equipment,End-Sealing Equipment Sintering Furnace,Cleaner |