The world standard for EUV and
x-ray reflectance measurements.

"Mirrors and detectors are the foundation of soft
x-ray science. We routinely measure the reflectivity and scattering properties of the most advanced x-ray and EUV optics in the world."

Eric Gullikson,
CXRO Reflectometer Principal Investigator

A worldwide standard.

The CXRO Reflectometer serves as a worldwide reference standard. Its high accuracy and un- rivaled precision enable it to characterize the fundamental optical properties of materials, the quality of optical elements, the efficiency of grating spectrometers, the scattering properties of ultra-smooth surfaces, and the sensitivity of detectors, at EUV and soft x-ray wavelengths.

Beamline specifications

• Wavelength precision: 0.007%
• Wavelength uncertainty: 0.0123%
• Reflectance precision: 0.08%
• Reflectance uncertainty: 0.08%
• Spectral purity: 99.98%
• Dynamic range: 10¹⁰

Endstation specifications

• 10 μm x 300 μm beam size
• 10 μm positioning precision
• Angular precision: 0.01 deg
• 6 degrees of freedom
• Sample size up to 200 mm

Eric Gullikson