Micro- and nanoelectronics 2007 : 1-5 October 2007, Zvenigorod, Russia
Kamil A. Vaiev, Alexander A. Orlikovsky, editors ; organized by FTIAN--Institute of Physics and Technology, Russian Academy of Sciences (Russia), SPIE Russia Chapter ; sponsored by Russian Foundation for Basic Research (Russia) ... [et al.]
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 7025)
SPIE, c2008
ICMNE-2007
ICMNE 2007
Microelectronics and nanoelectronics
International Conference on Micro- and Nanoelectronics 2007
"This volume contains selected papers from those presented at the International Conference on Micro- and Nanoelectronics 2007 (ICMNE-2007), held in Zvenigirod, Moscow region, 1-5 October 2007 "--P. xv
Includes bibliographical references and index
内容説明
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SPIE -- the International Society for Optical Engineering
SPIE -- the International Society for Optical Engineering