MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA

• • Smith, James H.
• • Krulevitch, Peter A.
• • Lakner, Hubert K.
• • Society of Photo-optical Instrumentation Engineers
• • Semiconductor Equipment and Materials International
• • Solid State Technology (Organization)
• • Sandia National Laboratories

• 関連文献: 1件

• • Smith, James H.
• • Krulevitch, Peter A.
• • Lakner, Hubert K.
• • Society of Photo-optical Instrumentation Engineers
• • Semiconductor Equipment and Materials International
• • Solid State Technology (Organization)
• • Sandia National Laboratories

MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA

James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA)

(Proceedings / SPIE -- the International Society for Optical Engineering, v. 4983)

SPIE, c2003

タイトル別名

Microelectromechanical systems and miniaturized systems III

MOEMS and miniaturized systems 3

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• 東京科学大学 大岡山図書館

  P63600/4983130972306

  OPAC

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Includes bibliographical references and index

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  Proceedings

  SPIE -- the International Society for Optical Engineering

  SPIE -- the International Society for Optical Engineering