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Microlithographic techniques in IC fabrication : 25-26 June, 1997, Singapore / Soon-Fatt Yoon, Raymond Yu, Chris A. Mack, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SPIE Singapore Chapter, Institute of Physics Singapore ; cosponsored by SPIE Japan Chapter ... [et al.] ; cooperating organizations Nanyang Technological University (Singapore) ... [et al.] ; published by SPIE--the International Society for Optical Engineering. -- Bellingham, Washington : SPIE , c1997. -- vii, 264 p. : ill. ; 28 cm. -- (Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3183). -- Includes bibliographic references and author index. -- ISBN 0819426105 ; (BC06943796) ; https://ci.nii.ac.jp/ncid/BC06943796
Author Heading(s): Yoon, Soon-Fatt ; Yu, Raymond ; Mack, Chris A. ; Society of Photo-optical Instrumentation Engineers ; Society of Photo-optical Instrumentation Engineers. Singapore Chapter ; Institute of Physics, Singapore ; Society of Photo-optical Instrumentation Engineers. Japan Chapter. -- Classification(s): LCC : TK7874 ; DC21 : 621.3815. -- Subject Heading(s): LCSH : Microlithography -- Industrial applications -- Congresses ; LCSH : Integrated circuits -- Design and construction -- Congresses ; LCSH : Integrated circuits -- Inspection -- Congresses ; LCSH : Process control -- Congresses
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