TY - BOOK
AU - Yoon, Soon-Fatt
AU - Yu, Raymond
AU - Mack, Chris A.
AU - Society of Photo-optical Instrumentation Engineers
AU - Society of Photo-optical Instrumentation Engineers. Singapore Chapter
AU - Institute of Physics, Singapore
AU - Society of Photo-optical Instrumentation Engineers. Japan Chapter
TI - Microlithographic techniques in IC fabrication : 25-26 June, 1997, Singapore
PB - SPIE
PY - 1997
T2 - Proceedings / SPIE -- the International Society for Optical Engineering
VL - v. 3183
EP - vii, 264 p.
UR - https://ci.nii.ac.jp/ncid/BC06943796
SN - 0819426105
ER -
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