Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia

• • Device and Process Technologies for MEMS and Microelectronics (Conference)
• • Chau, Kevin
• • Dimitrijev, Sima
• • Society of Photo-optical Instrumentation Engineers
• • Institution of Radio and Electronics Engineers, Australia
• • Queensland. Government State Development
• • Griffith University Microelectronics Engineering Society

• 関連文献: 1件

• • Device and Process Technologies for MEMS and Microelectronics (Conference)
• • Chau, Kevin
• • Dimitrijev, Sima
• • Society of Photo-optical Instrumentation Engineers
• • Institution of Radio and Electronics Engineers, Australia
• • Queensland. Government State Development
• • Griffith University Microelectronics Engineering Society

Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia

Kevin Chau, Sima Dimitrijev, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) ... [et al.]

(Proceedings / SPIE -- the International Society for Optical Engineering, v. 3892)

SPIE, c1999

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• 東京科学大学 大岡山図書館

  P63600/3892130984398

  OPAC

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Includes bibliographical references and index

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  Proceedings

  SPIE -- the International Society for Optical Engineering

  SPIE -- the International Society for Optical Engineering