Advances in microelectronic device technology : 7-9 November 2001, Nanjing, China
Qin-Yi Tong, Ulrich M. Goesele, chairs/editors ; sponsored and organized by SPIE--the International Society for Optical Engineering, SEU--Southeast University (China), [and] COEMA--China Optics and Optoelectronics Manufacturers Association ; cooperating organizations, Electronic Society, Jiangsu Province (China) [and] Laser and Optical Engineering Society, Jiangsu Province (China)
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 4600)
SPIE, c2001
"First International Conference on Advanced Microelectronic/Optoelectronic Device Technology ... part of SPIE International Symposium on Optoelectronics and Microelectronics"--P. xi
Includes bibliographical references and index
SPIE -- the International Society for Optical Engineering
SPIE -- the International Society for Optical Engineering