Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A.
editors, B.J. Pawlak ... [et al.]
(Materials Research Society symposium proceedings, v. 912)
Materials Research Society, c2006
"This volume contains papers presented at Symposium C, "Sub-Second Rapid Thermal Processing for Device Fabrication," held April 18-19 at the 2006 MRS Spring Meeting in San Francisco, California."--Pref.
Includes bibliographical references and indexes
Materials Research Society , North-Holland