Microprocesses and Nanotechnology '97 : proceedings of the 1997 International Microprocesses and Nanotechnology Conference, July 7-10, 1997, Nagoya, Japan
organized by K. Gamo ; sponsored by the Japan Society of Applied Physics(JSAP) ... [et al.]
Association of Super-Advanced Electronics Tecnologies, 1998?]
"Reprinted from Jpn. J. Appl. Phys. Vol. 36(1997)Part 1, No.12B"
"The 10th Internationa Microprocess and Nanotechnology Conference(MNC'97) was held at Nagoya Congress Center in Nagoya-City from July 7 through July 10, 1997..."--Preface
Includes bibliographical references and author index