Text ( visual ) : unmediated
Micromachines as tools for nanotechnology / H. Fujita (Ed.). -- Berlin : Springer , c2003. -- xii, 211 p. : ill. ; 25 cm. -- (Microtechnology and MEMS). -- Includes bibliographical references. -- ISBN 354000856X ; (BA63431419) ; https://ci.nii.ac.jp/ncid/BA63431419
Author Heading(s): 藤田, 博之 . -- Classification(s): LCC : T174.7 ; DC21 : 620/.5. -- Subject Heading(s): LCSH : Nanotechnology ; LCSH : Microelectromechanical systems
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