TY - BOOK AU - Stutzmann, M. (Martin) AU - Materials Research Society TI - Amorphous and heterogeneous silicon-based films - 2001 : symposium held April 16-20, 2001, San Francisco, California, U.S.A. PB - Materials Research Society PY - 2001 T2 - Materials Research Society symposium proceedings VL - v. 664 EP - 1 v. UR - https://ci.nii.ac.jp/ncid/BA55403600 SN - 1558996001 ER -