Digest of papers 1989, 2nd MicroProcess Conference, July 2-5, 1989, Kobe, Japan
Publication Office, Business Center for Academic Societies Japan, c1989
"Sponsored by The Japan Society of Applied Physics, In cooperation with American Vacuum Society, IEEE Electron Devices Society"--T.p.
"Supported financially in part by The Commemorative Association for the Japan World Exposition (1970)"--T.p.