Text ( visual ) : unmediated
Digest of papers 1990, 3rd MicroProcess Conference, July 16-19, 1990, Chiba, Japan. -- Tokyo : Publication Office, Business Center for Academic Societies Japan , c1990. -- xvii, 191 p. ; 28 cm. -- "Sponspred by The Japan Society of Applied Physics, In cooperation with American Vacuum Society , IEEE Electron Devices Society"--T.p.. -- ISBN 4900526045 ; (BA50143819) ; https://ci.nii.ac.jp/ncid/BA50143819
Author Heading(s): 難波, 進 ; 応用物理学会 ; American Vacuum Society ; IEEE Electron Devices Society
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