Text ( visual ) : unmediated
1997 International Workshop on X-ray and Extreme Ultraviolet Lithography July 13-15,1997 Pacifico Yokohama, Yokohama : Digest of Papers XEL '97 / Susumu Namba, Yasuyoshi Sakai chair, Organizing Committee. -- [出版地不明] : XEL'97組織委員会 ,[1997.9]. -- 1 v.(various paging) ; 32 cm. -- (BA33799461) ; https://ci.nii.ac.jp/ncid/BA33799461
Other Title(s): Digest of Papers XEL'97. -- Author Heading(s): XEL'97組織委員会 ; 難波, 進 ; Sakai, Yasuyoshi. -- Classification(s): NDC9 : 549.9
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