@book{ BA26633662, author = "Raĭzer, I︠U︡. P. (I︠U︡riĭ Petrovich) and Shneider, Mikhail N. and Yatsenko, Nikolai A.", title = "Radio-frequency capacitive discharges", publisher = "CRC Press", year = "1995", URL = "https://ci.nii.ac.jp/ncid/BA26633662" }

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