@book{ BA26159233, author = "Letardi, Tommaso and Laude, Lucien D. and European Congress on Optics and European Physical Society and European Federation for Applied Optics and Society of Photo-optical Instrumentation Engineers and Association nationale de la recherche technique", title = "Excimer lasers and applications III : proceedings : ECO4 : 13-15 March 1991, the Hague, the Netherlands", publisher = "SPIE", year = "1991", series = "Proceedings / SPIE -- the International Society for Optical Engineering", number = "v. 1503", URL = "https://ci.nii.ac.jp/ncid/BA26159233" }