%A Letardi, Tommaso
%A European Congress on Optics
%A European Physical Society
%A European Federation for Applied Optics
%A Society of Photo-optical Instrumentation Engineers
%A Association nationale de la recherche technique
%T Excimer lasers and applications II : ECO3, 15 March 1990, the Hague, the Netherlands
%I SPIE
%D 1990
%S Proceedings / SPIE -- the International Society for Optical Engineering
%V v. 1278
%U https://ci.nii.ac.jp/ncid/BA25257736
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