Advanced semiconductor processing and characterization of electronic and optical materials : January 24-25, 1984, Los Angeles, California
chairmen/editors: Devendra K. Sadana, Carl M. Lampert ; cooperating organizations: American Vacuum Society, Electronic Materials and Process Division
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 463)
S.P.I.E.-- International Society for Optical Engineering, c1984
Includes bibliographies and index
SPIE -- the International Society for Optical Engineering
SPIE -- the International Society for Optical Engineering