TY - BOOK
AU - Boyd, Ian W.
AU - Krimmel, E. F.
AU - Symposium B on Photon, Beam, and Plasma Assisted Processing Fundamentals and Device Technology
TI - Photon, beam and plasma assisted processing : proceedings of Symposium B on Photon, Beam and Plasma Assisted Processing Fundamentals and Device Technology of the 1988 E-MRS Spring Conference, Strasbourg, France, 31 May to 2 June 1988
PB - North-Holland
PY - 1989
T2 - European Materials Research Society symposia proceedings
VL - v. 2
EP - xxxix, 703 p.
UR - https://ci.nii.ac.jp/ncid/BA07003703
SN - 0444873015
ER -
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