@book{ BA07003703,
 author = "Boyd, Ian W. and Krimmel, E. F. and Symposium B on Photon, Beam, and Plasma Assisted Processing Fundamentals and Device Technology",
 title = "Photon, beam and plasma assisted processing : proceedings of Symposium B on Photon, Beam and Plasma Assisted Processing Fundamentals and Device Technology of the 1988 E-MRS Spring Conference, Strasbourg, France, 31 May to 2 June 1988",
 publisher = "North-Holland",
 year = "1989",
 series = "European Materials Research Society symposia proceedings",
 number = "v. 2",
 URL = "https://ci.nii.ac.jp/ncid/BA07003703"
}
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