日本語フィールド
著者:Y.Ohtsu, H.Urasaki, T.Misawa, H.Fujita題名:Production of High-Density Plasma with Plasma-Ring Discharge発表情報:Proc. 27th Symp. Plasma Processing, Yokohama, P1-01. ページ: 129-130キーワード:概要:抄録:英語フィールド
Author:Y.Ohtsu, H.Urasaki, T.Misawa, H.FujitaTitle:Production of High-Density Plasma with Plasma-Ring DischargeAnnouncement information:Proc. 27th Symp. Plasma Processing, Yokohama, P1-01. Page: 129-130