Course Description
This course explores statistical modeling and control in manufacturing processes. Topics include the use of experimental design and response surface modeling to understand manufacturing process physics, as well as defect and parametric yield modeling and optimization. Various forms of process control, including ...
This course explores statistical modeling and control in manufacturing processes. Topics include the use of experimental design and response surface modeling to understand manufacturing process physics, as well as defect and parametric yield modeling and optimization. Various forms of process control, including statistical process control, run by run and adaptive control, and real-time feedback control, are covered. Application contexts include semiconductor manufacturing, conventional metal and polymer processing, and emerging micro-nano manufacturing processes.
Course Info
Instructors
Learning Resource Types
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Demonstration Videos
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Problem Sets with Solutions
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Exams with Solutions
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Lecture Notes
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Lecture Videos
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Written Assignments with Examples
A Si stamp patterned with grids of varying orientations and linewidths is used to stamp PMMA.
To create embossed microstructures in PMMA, the silicon stamp must be carefully patterned and manufactured. (Image courtesy of Hayden Taylor. Used with permission.)